THIN FILM DEPOSITION APPARATUS,申请号KR20100017224-传众专利搜索

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发明名称	THIN FILM DEPOSITION APPARATUS
摘要
申请公布号	KR20110097399(A)	申请公布日期	2011.08.31
申请号	KR20100017224	申请日期	2010.02.25
申请人	WONIK IPS CO., LTD.	发明人	YOO, HEE YOUNG
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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