SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD

摘要

PURPOSE: A substrate processing system and a substrate transferring method are provided to improve the transfer efficiency of a substrate by bidirectionally transferring the substrate using a bidirectional substrate transfer unit between a plurality of process chambers. CONSTITUTION: A transfer chamber(TC) includes one or more bidirectional substrate transfer devices which bidirectionally transfer the substrate. A plurality of process chambers(PC) is arranged in a line while interposing a transfer chamber. A transfer unit(200) is installed in the transfer chamber to horizontally transfer the substrate by a linear motor. A bidirectional substrate transfer unit(300) transfers a process chamber through a bidirectional sliding process. A rotating unit rotates the bidirectional substrate transfer unit with a preset angle.