摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an antireflection film manufacturing mold manufacturing the antireflection film manufacturing mold formed with uniform fine holes by an anode oxidation process even when using a metal base body with an uneven crystal state and surface shape. <P>SOLUTION: The method of manufacturing the antireflection film manufacturing mold includes a fine hole forming process of forming the fine holes on the surface of the metal base body by anode oxidation, using the metal base body containing aluminum, and having an uneven layer with the uneven crystal state or surface shape, and in the fine hole forming process, a part of alumina film is etched. <P>COPYRIGHT: (C)2011,JPO&INPIT |