发明名称 |
Defect Inspection Apparatus and Its Method |
摘要 |
A defect inspection apparatus for inspecting defects on an inspecting object includes an illuminator which irradiates a beam of light on the inspecting object, a photo-detector which detects rays of light from the inspecting object due to the irradiation of the light beam by the illuminator, a defect detector which detects a defect by processing a signal obtained through detection by the photo-detector, a characteristic quantity calculator which calculates a characteristic quantity related to a size of the defect, and a defect size calculator which uses a relation between size and characteristic quantity which is calculated by an optical simulation and calculates a size of the detected defect.
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申请公布号 |
US2011205534(A1) |
申请公布日期 |
2011.08.25 |
申请号 |
US201113099530 |
申请日期 |
2011.05.03 |
申请人 |
HAMAMATSU AKIRA;SHIBUYA HISAE;MAEDA SHUNJI |
发明人 |
HAMAMATSU AKIRA;SHIBUYA HISAE;MAEDA SHUNJI |
分类号 |
G01N21/88;G01N21/93;G01N21/956;G03F1/84;H01L21/027;H01L21/66 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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