The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
申请公布号
WO2011103176(A1)
申请公布日期
2011.08.25
申请号
WO2011US25065
申请日期
2011.02.16
申请人
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM;WILLSON, C., GRANT;OGAWA, TSUYOSHI;JACOBSSON, B., MICHAEL
发明人
WILLSON, C., GRANT;OGAWA, TSUYOSHI;JACOBSSON, B., MICHAEL
