WASHING LIQUID COMPOSITION FOR DEPOSITION MATERIAL AND WASHING METHOD USING THE SAME
摘要
PURPOSE: A cleaning solution composition for deposition materials is provided to shorten the time of a production process and to save production costs by rapidly removing the deposition materials attached to the production apparatus of an electric optical device. CONSTITUTION: A cleaning solution composition for deposition materials comprises: 5-80 weight% of N-methyl-2-pyrrolidone; and 20-95 weight% of 1,3-dimethyl-2-imidazolidinone. A cleaning method comprises a step of removing the deposition materials attached to the production apparatus of an electric optical device using the cleaning solution composition for deposition materials.
申请公布号
KR20110095814(A)
申请公布日期
2011.08.25
申请号
KR20110011876
申请日期
2011.02.10
申请人
DONGJIN SEMICHEM CO., LTD.
发明人
KIM, BYUNG UK;YOON, SUK IL;JEONG, JONG HYUN;HUH, SOON BEOM;SHIN, SUNG GUN;JUNG, SE HWAN;JANG, DOO YOUNG;PARK, SUN JOO;KWEON, OH HWAN