| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an organic thin film forming method increasing an angle of contact of pure water with a surface of the organic thin film without increasing the content of a highly hydrophobic component. <P>SOLUTION: The organic thin film forming method includes a coating step of coating an organic solution containing a first component and a second component which is higher in hydrophobicity than the first component on a substrate, and a heat-treating step of heat-treating the coated organic solution after the coating step to form a film. The coating step includes: a first step of dropping the organic solution onto the substrate and unifying the thickness of the dropped organic solution in an atmosphere that contains vapor of an evaporated liquid under a first vapor pressure; and a second step of unifying the thickness of the dropped organic solution in an atmosphere that contains the vapor of the evaporated liquid under a second vapor pressure higher than the first vapor pressure after the first step. <P>COPYRIGHT: (C)2011,JPO&INPIT |
