SLIT NOZZLE CLEANING APPARATUS AND COATING APPARATUS

摘要

PURPOSE: A slit nozzle cleaning apparatus and a coating device using thereof are provided to improve the cleaning efficiency for removing the cleaning tact time and reducing the washing solution consumption. CONSTITUTION: A slit nozzle cleaning apparatus comprises the following: a carriage(64) moving on the horizontal cleaning-scanning direction around an outlet of a slit nozzle(32); a first cleaning unit(70) spraying cleaning fluid around the outlet of the slit nozzle by being mounted on the carriage; and a first wafer unit(72) for wiping the fluid from the outlet of the slit nozzle, located on the rear side of the cleaning unit and mounted on the carriage.