PLASMA PROCESSING EQUIPMENT AND PLASMA GENERATION EQUIPMENT,申请号KR20117016370-传众专利搜索

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发明名称	PLASMA PROCESSING EQUIPMENT AND PLASMA GENERATION EQUIPMENT
摘要
申请公布号	KR20110094346(A)	申请公布日期	2011.08.23
申请号	KR20117016370	申请日期	2009.01.15
申请人	HITACHI HIGH-TECHNOLOGIES CORPORATION	发明人	NISHIO RYOJI
分类号	H05H1/46;H01L21/36	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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