| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a visual inspecting system which can implement efficient inspection in a short time by speedily acquiring to inspect image data including only a desired part. <P>SOLUTION: In the visual inspecting system with an ROI inspection function, image data for forming reference image is cut out including an aligning margin from a scanning stripe image arranged on a semiconductor wafer, based on a region specifying condition set. The plurality of image data cut out are added to average to compose the reference image for the ROI inspection. Also, misdetermination is prevented by providing a predetermined prohibition condition when cutting out the image data for the reference image. <P>COPYRIGHT: (C)2011,JPO&INPIT |
