发明名称 METHOD OF MANUFACTURING PACKAGE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE AND RADIO CONTROLLED CLOCK
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a package which can form a through electrode without a continuity defect while maintaining airtightness inside a cavity by suppressing the generation of a gap in glass after being fired, and a piezoelectric vibrator, an oscillator, an electronic device and a radio controlled clock manufactured by the manufacturing method. SOLUTION: The method of manufacturing the package includes: a rivet body arranging process of inserting the core material part 7b of a conductive rivet body 7 including a planar base part 7a and the core material part 7b erected from the surface of the base part 7a along the normal direction, to a through-hole 30; a glass frit filling process of filling glass frit 61 to the gap of the inner peripheral surface of the through-hole 30 and the outer peripheral surface of the core material part 7b and sealing the gap; and a firing process of firing and hardening the glass frit 61 filled inside the through-hole 30. The firing process is performed by heating the base part 7a of the rivet body 7. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011160352(A) 申请公布日期 2011.08.18
申请号 JP20100022409 申请日期 2010.02.03
申请人 SEIKO INSTRUMENTS INC 发明人 FUNABIKI YOICHI
分类号 H03H3/02;H01L23/04;H03H9/02 主分类号 H03H3/02
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