VACUUM DEPOSITION APPARATUS OF THE WINDING TYPE,申请号EP20060713691-传众专利搜索

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发明名称	VACUUM DEPOSITION APPARATUS OF THE WINDING TYPE
摘要
申请公布号	EP1849888(B1)	申请公布日期	2011.08.17
申请号	EP20060713691	申请日期	2006.02.14
申请人	ULVAC, INC.	发明人	HAYASHI, NOBUHIRO;YOKOI, SHIN;TADA, ISAO;NAKATSUKA, ATSUSHI
分类号	C23C14/56	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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