发明名称 Particle trap
摘要 An apparatus and method for trapping particles in a housing is disclosed. A high voltage terminal/structure is situated within a housing. A conductive material, having a plurality of holes, such as a mesh, is disposed a distance away from an interior surface of the housing, such as the floor of the housing, forming a particle trap. The conductive mesh is biased so that the electrical field within the trap is either non-existent or pushing toward the floor, so as to retain particles within the trap. Additionally, a particle mover, such as a fan or mechanical vibration device, can be used to urge particles into the openings in the mesh. Furthermore, a conditioning phase may be used prior to operating the high voltage terminal, whereby a voltage is applied to the conductive mesh so as to attract particles toward the particle trap.
申请公布号 US8000080(B2) 申请公布日期 2011.08.16
申请号 US20080327888 申请日期 2008.12.04
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 KRAUSE STEPHEN E.;LOW RUSSELL J.;TEKLETSADIK KASEGN D.
分类号 H01T23/00;H01H47/00;H01P1/10 主分类号 H01T23/00
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