发明名称 Method and apparatus for making semiconductor devices including a foil
摘要 A method for manufacturing a semiconductor device including covering a portion of at least one semiconductor device with a foil, including covering at least one target region of the semiconductor device, and illuminating the foil with a laser to singulate from the foil a portion covering the at least one target region of the at least one semiconductor device.
申请公布号 US7999362(B2) 申请公布日期 2011.08.16
申请号 US20080020151 申请日期 2008.01.25
申请人 INFINEON TECHNOLOGIES AG 发明人 MIO HANNES;GROENINGER HORST;VILSMEIER HERMANN
分类号 H01L23/552 主分类号 H01L23/552
代理机构 代理人
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