| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device and method for measurement of a particle size using a terahertz wave, capable of measuring a particle size inexpensively and quickly without requiring much labor. <P>SOLUTION: The device includes: a laser diode 1 for emitting laser light; a beam splitter 2 for splitting laser light emitted from the laser diode 1 into first laser light and second laser light; a terahertz wave oscillating antenna 5 for oscillating a terahertz wave by irradiation with the first laser light; a terahertz wave receiving antenna 8 for detecting a terahertz wave at a detection timing based on the second laser light, and generating a detection signal corresponding to the intensity of the detected terahertz wave; and a data holding part 52 and a data processing part 56 for calculating a characteristic quantity only from signal intensity data based on a detection signal generated by the terahertz wave receiving antenna 8 when a object to be measured 100 is installed in a terahertz wave path, and estimating the particle size of the object to be measured 100 by referring to a database 58 holding data of the particle size corresponding to the characteristic quantity. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
