| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatically capacitive electromechanical transducer in which electrodes in a movable region are less likely to affect the mechanical characteristics of the movable region and in which an electrical potential distribution of the surface of the electrodes in the movable region is reduced. SOLUTION: The electrostatically capacitive electromechanical transducer includes first electrodes 102 and second electrodes 107 opposing the first electrodes 102 with gaps 106 interposed therebetween. The resistance per unit area of the first electrodes 102 differs in first electrodes 103 in a movable region relative to the second electrodes 107 and in first electrodes 104 in an unmovable region relative to the second electrodes 107. The thickness of the first electrodes 103 in the movable region is less than the first electrodes 104 in the unmovable region. COPYRIGHT: (C)2011,JPO&INPIT |
