发明名称 |
METHOD TO DEFINE CONCENTRATION OF ELEMENTS IN SOLID BODY |
摘要 |
FIELD: physics. ^ SUBSTANCE: solid body surface is irradiated by primary electron beam, and power spectrum of electrons escaped from solid body is registered. Note here that solid body surface with is sequentially irradiated by electron beam with stepwise increased in power in the range of (100-10000) eV to register absolute differential coefficients of electron elastic dissipation for each power magnitude in the range of dissipation angles of 90-180 at the number of angles corresponding to that of elements in solid body. Thereafter, mean concentrations of elements in escape zone and zone depth are calculated to determine distribution of concentrations over solid body surface layer. ^ EFFECT: determination of concentration in nano range without destructing analysed layer. ^ 3 dwg |
申请公布号 |
RU2426105(C1) |
申请公布日期 |
2011.08.10 |
申请号 |
RU20100100069 |
申请日期 |
2010.01.11 |
申请人 |
GOSUDARSTVENNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "SANKT-PETERBURGSKIJ GOSUDARSTVENNYJ EHLEKTROTEKHNICHESKIJ UNIVERSITET "LEHTI" IM. V.I. UL'JANOVA (LENINA)" |
发明人 |
BARCHENKO VLADIMIR TIMOFEEVICH;LUCHININ VIKTOR VIKTOROVICH;PRONIN VLADIMIR PETROVICH;KHINICH IOSIF ISAAKOVICH |
分类号 |
G01N23/221 |
主分类号 |
G01N23/221 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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