| 摘要 |
PURPOSE: An electrostatic chuck is provided to make an oxidation film layer and skip a spraying process for insulation between a body layer and electrode layer, thereby simplifying a manufacturing process and improving adhesive force with a sprayed layer, withstand voltage, heat resistance, impact resistance, and temperature characteristic. CONSTITUTION: An electrostatic chuck is comprised of a body layer(110), an electrode layer(120), and a dielectric layer. An oxidation film layer is formed on the surface of the electrode layer made of aluminum material. The electrode layer is combined on the body layer. The dielectric layer is formed by spraying aluminum oxide on the electrode layer.
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