发明名称 Semiconductor device and method of fabricating the same
摘要 A semiconductor device according to one embodiment includes: a substrate having an element region where a semiconductor element is formed; a via hole formed in a portion of the substrate adjacent to the element region; a conducting portion provided in the via hole via an insulating layer; and a buffer layer provided between the substrate and the insulating layer, wherein the buffer layer is made of a material in which a difference in thermal expansion coefficient between the substrate and the buffer layer is smaller than that between the substrate and the insulating layer.
申请公布号 US7994641(B2) 申请公布日期 2011.08.09
申请号 US20090492167 申请日期 2009.06.26
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 INOHARA MASAHIRO
分类号 H01L29/72 主分类号 H01L29/72
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