发明名称 HEATER AND METHOD OF MANUFACTURING PACKAGED BODY
摘要 <p><P>PROBLEM TO BE SOLVED: To improve tact time of a heater. <P>SOLUTION: The heater is equipped with: a first pressing part for heating an object to be heated; a second pressing part having an elastic body for sandwiching the object between the first pressing part and the elastic body; and a floating tool for thermally isolating the first pressing part from the object, holding the object between the first pressing part and the second pressing part, and thermally connecting the object with the first pressing part when one of the first and second pressing parts presses the object against the other. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011151264(A) 申请公布日期 2011.08.04
申请号 JP20100012426 申请日期 2010.01.22
申请人 SONY CHEMICAL & INFORMATION DEVICE CORP 发明人 MATSUMURA TAKASHI
分类号 H01L25/04;H01L21/60;H01L25/18 主分类号 H01L25/04
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