| 摘要 |
A semiconductor apparatus includes a plurality of pump control units respectively located in a plurality of chips, connected in series through a first TSV, and configured to sequentially delay a period signal, transmit delayed period signals and generate pump control signals based on the period signal or the delayed period signals; and a plurality of voltage pump units respectively located in the plurality of chips, and configured to generate a pumping voltage in response to the pump control signals generated from the plurality of pump control units.
|
