发明名称 PEELING TEST DEVICE, AND PEELING TEST METHOD
摘要 PROBLEM TO BE SOLVED: To provide a test method in which a stage where peeling has occurred can be ascertained. SOLUTION: Each of a plurality of peeling reinforcement blocks 2-1, 2-2, 2-3 and 2-4 includes wiring groups formed in a plurality of wiring layers and conductor holes which electrically connect the wiring groups between the plurality of wiring layers. A test circuit 1 includes a plurality of data holding circuits provided corresponding to the plurality of peeling reinforcement blocks, a test signal supply terminal for supplying a test signal to one end of each of the plurality of peeling reinforcement blocks, and a nonvolatile storage circuit connected to the plurality of data holding circuits. Each of the plurality of data holding circuits holds, as a test result, a signal output from the other end of corresponding one of the respective peeling reinforcement blocks in response to the test signal. The nonvolatile storage circuit is connected to the respective data holding circuits so that test result data held in the respective data holding circuits are made to correspond to the respective data holding circuits to be stored. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011151084(A) 申请公布日期 2011.08.04
申请号 JP20100009443 申请日期 2010.01.19
申请人 RENESAS ELECTRONICS CORP 发明人 INABA MASAKI
分类号 H01L27/04;H01L21/66;H01L21/822 主分类号 H01L27/04
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