SILICIDE THERMAL HEATERS FOR SILICON-ON-INSULATOR NANOPHOTONIC DEVICES
摘要
A thermally switched Silicon-On-Insulator (SOI) photo electronic device includes a silicon layer including an optical waveguide and a silicide heating element horizontally adjacent to the waveguide. The waveguide has a refractive index that changes with heat applied to the waveguide.
申请公布号
EP2185958(A4)
申请公布日期
2011.08.03
申请号
EP20080799070
申请日期
2008.09.02
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GREEN, WILLIAM, M.;HAMANN, HENDRIK, F.;VLASOV, YURII, A.