MANUFACTURING METHOD OF MASK FOR DEPOSITING THIN FILM ON SUBSTRATE

摘要

PURPOSE: A manufacturing method of a thin film deposition mask are provided to manufacture a mask in which deposition performance is excellent at low cost by being formed a declined part with laser machining in a side which faces an opening of a patterned portion of mask. CONSTITUTION: A raw material substrate(121) for mask is prepared. A pattern which has a plurality of openings is formed after eliminating a part of the substrate. A declined part(133a) is formed on the edge of the pattern which faces the opening by eliminating a part of the edge of the pattern using laser beam(177) which enters to fall an angle about the substrate.