发明名称 Display device having oxide thin film transistor and fabrication method thereof
摘要 A display device including an oxide thin film transistor (TFT) is disclosed. A nitride-based gate insulating layer of a gate pad area is etched when an oxide semiconductor layer of a pixel area is etched by using a half-tone mask, a metal layer is formed at a contact hole of the etched gate insulting layer, and then a passivation layer formed thereon is etched. Thus, an overhang of the passivation layer can be prevented from being generated when the gate insulating layer is etched, and accordingly, the fabrication process can be simplified.
申请公布号 US7989274(B2) 申请公布日期 2011.08.02
申请号 US20090649880 申请日期 2009.12.30
申请人 LG DISPLAY CO., LTD. 发明人 KANG IM-KUK;KIM DAE-WON
分类号 H01L21/00;H01L21/84 主分类号 H01L21/00
代理机构 代理人
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