用于基材处理腔室的盖组件,申请号TW099303810-传众专利搜索

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发明名称	用于基材处理腔室的盖组件
摘要
申请公布号	TWD141830	申请公布日期	2011.08.01
申请号	TW099303810	申请日期	2010.08.03
申请人	应用材料股份有限公司	发明人	石川哲也;谭亚历山大;考区大卫Ｈ
分类号	15-99	主分类号	15-99
代理机构		代理人	蔡坤财台北市中山区松江路148号11楼;李世章台北市中山区松江路148号11楼
主权项
地址	美国

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