METHOD FOR TILTING BEAM COLUMN OF BEAM SYSTEM, APPARATUS THEREFOR, AND BEAM SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a system and a method capable of tilting a column over a range of column tilt angles despite during system operation while maintaining a constant eucentric point.

SOLUTION: A column tilt apparatus (2000) is equipped with a first subassembly (2100) and a second subassembly (2200). The first subassembly (2100) remains stationary, whereas the second subassembly (2200) moves with respect to the first subassembly (2100) with a motor (2220) and a gear unit (2240) so that a beam always passes through a constant eucentric point. A beam column is mounted on the second subassembly (2200) so as to move together with the same. While vacuum is maintained, a bellows assembly (2300) is mounted to enable motion between both subassemblies (2100) and (2200).

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