METHOD OF MANUFACTURING POLISHING PAD HAVING DETECTION WINDOW AND POLISHING PAD HAVING DETECTION WINDOW

摘要

METHOD OF MANUFACTURING POLISHING PAD HAVING DETECTION OF THE DISCLOSUREA polishing pad having a detection window and a method of manufacturing thepolishing pad are provided. A dummy detection window is pre-disposed in a mold.A polishing layer precursor is filled into the mold, and then a solidifying process isperformed to form a polishing layer, wherein the polishing layer and the dummydetection window are separable completely. The polishing layer and the dummydetection window are separated from each other so as to form a detection opening in thepolishing layer. The detection opening can alternatively be formed in a mold having aprotrusion structure to replace the dummy detection window. A detection windowprecursor is filled into the detection opening, and then a solidifying process isperformed to form a detection window.Figures 1A - 1D