Identifying the Defective Layer of a Yield Excursion Through the Statistical Analysis of Scan Diagnosis Results

摘要

Yield excursions in the manufacturing process today require an expensive, long and tedious physical failure analysis process to identify the root cause. Techniques are disclosed herein for efficiently identifying the root-cause of a manufacturing yield excursion by analyzing fail data collected from the production test environment. In particular, statistical hypothesis testing is used in a novel way to analyze logic diagnosis data along with information on physical features in the design layout and reliably identify the cause of the yield excursion.