发明名称 |
SENSOR DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
A sensor device having small variations in sensor characteristics and improved resistance to electrical noise is provided. This sensor device has a sensor unit, which is provided with a frame having an opening, a movable portion held in the opening to be movable relative to the frame, and a detecting portion for outputting an electric signal according to a positional displacement of the movable portion, and a package substrate made of a semiconductor material, and bonded to a surface of the sensor unit. The package substrate has an electrical insulating film on a surface facing the sensor unit. The package substrate is bonded to the sensor unit by forming a direct bonding between an activated surface of the electrical insulating film and an activated surface of the sensor unit at room temperature. |
申请公布号 |
EP1953816(A4) |
申请公布日期 |
2011.07.27 |
申请号 |
EP20060833259 |
申请日期 |
2006.11.24 |
申请人 |
PANASONIC ELECTRIC WORKS CO., LTD. |
发明人 |
OKUDO, TAKAFUMI;SUZUKI, YUJI;TAKEGAWA, YOSHIYUKI;BABA, TORU;GOTOU, KOUJI;MIYAJIMA, HISAKAZU;KATAOKA, KAZUSHI;SAIJO, TAKASHI |
分类号 |
B81B7/00;G01C19/56;G01P1/02;G01P15/08;G01P15/125 |
主分类号 |
B81B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|