发明名称 DEVICE STRUCTURE, LAYOUT AND FABRICATION METHOD FOR UNIAXIALLY STRAINED TRANSISTORS
摘要 A semiconductor device and method for fabricating a semiconductor device include providing a strained semiconductor layer having a first strained axis, forming an active region within a surface of the strained semiconductor layer where the active region has a longitudinal axis along the strained axis and forming gate structures over the active region. Raised source/drain regions are formed on the active regions above and over the surface of the strained semiconductor layer and adjacent to the gate structures to form transistor devices.
申请公布号 US2011175164(A1) 申请公布日期 2011.07.21
申请号 US20100689346 申请日期 2010.01.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BEDELL STEPHEN W.;BU HUIMING;CHENG KANGGUO;DORIS BRUCE B.;FALTERMEIER JOHNATHAN E.;KHAKIFIROOZ ALI;SADANA DEVENDRA K.;YEH CHUN-CHEN
分类号 H01L27/12;H01L21/86 主分类号 H01L27/12
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