| 摘要 |
PROBLEM TO BE SOLVED: To prevent conveying efficiency from being degraded in a conveying vehicle system. SOLUTION: A conveying vehicle system 1 includes a conveying vehicle 3, a CW sensor 57, and a manufacture controller 21. The conveying vehicle 3 conveys a carrier 49 containing substrates 50 between a plurality of apparatuses. The CW sensor 57 detects the states of the substrate 50 in the carrier 49. The manufacture controller 21 controls the conveyance of the conveying vehicle 3, and stops the conveying vehicle 3 to convey the carrier 49 from one device to the other device if an abnormal signal is inputted from the CW sensor 57. COPYRIGHT: (C)2011,JPO&INPIT
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