| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection apparatus for reducing an influence of an insensitive region and improving inspection precision. SOLUTION: The surface inspection apparatus 1 includes: a stage 10; an illumination system 20; a light reception system 30; an imaging element 50 including a plurality of light reception parts and an insensitive part that is provided around the light reception parts and does not receive light; a pixel complementation drive part 35 for relatively moving the imaging element 50; a control part 40 for controlling operation of the pixel complementation drive part 35 and the imaging element 50 so that the imaging element 50 captures a plurality of images while relatively moving with a relative amount of travel smaller than an interval among the plurality of light reception parts; and an image processing part 45 for generating a composited image composited by lining up each of a plurality of images captured by the imaging element 50 in order according to relative movement by the image complementation drive part 35. A shielding member for shielding a part of the light reception part is provided on an imaging surface 50a of the imaging element 50. COPYRIGHT: (C)2011,JPO&INPIT
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