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发明名称
UNTERSUCHUNGSEINRICHTUNG UND UNTERSUCHUNGSVERFAHREN FÜR STRUKTURPROFILE
摘要
申请公布号
AT514940(T)
申请公布日期
2011.07.15
申请号
AT20020783676T
申请日期
2002.11.28
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
UDA, MITSURU;TERAKAWA, KAZUNARI;SUZUKI, AKIRA;MORITA, CHIAKI;YAMADA, YASUHARU;HAYAND, TERUHIKO
分类号
G01N21/956;G03F7/20;H01L21/027;H01L21/66
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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