ANSTEUERN EINES ARRAYS VON ELEMENTEN EINES MIKROELEKTROMECHANISCHEN SYSTEMS (MEMS),申请号AT20030775657T-传众专利搜索

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发明名称	ANSTEUERN EINES ARRAYS VON ELEMENTEN EINES MIKROELEKTROMECHANISCHEN SYSTEMS (MEMS)
摘要
申请公布号	AT516625(T)	申请公布日期	2011.07.15
申请号	AT20030775657T	申请日期	2003.12.01
申请人	EPCOS AG	发明人	RIJKS, THEODOOR;MATTERS, MARCO;VAN BEEK, JOZEF
分类号	H03B5/12;H01H59/00;H03B5/08;H03H7/01	主分类号	H03B5/12
代理机构		代理人
主权项
地址

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