EMBEDDED MEMS SENSORS AND RELATED METHODS,申请号WO2010US55688-传众专利搜索

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发明名称	EMBEDDED MEMS SENSORS AND RELATED METHODS
摘要	Embodiments of embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.
申请公布号	WO2011084229(A2)	申请公布日期	2011.07.14
申请号	WO2010US55688	申请日期	2010.11.05
申请人	ARIZONA BOARD OF REGENTS, FOR AND ON BEHALF OF ARIZONA STATE UNIVERSITY;LAKAMRAJU, NARENDRA, V.;VENUGOPAL, SAMEER, M.	发明人	LAKAMRAJU, NARENDRA, V.;VENUGOPAL, SAMEER, M.
分类号	B81C1/00;B81B7/02;H01L21/64	主分类号	B81C1/00
代理机构		代理人
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