SENSOR DYNAMICALLY DETECTING BREAKAGE OF SUBSTRATE AND SHIFT OF SUBSTRATE BEING MOVED

摘要

PROBLEM TO BE SOLVED: To detect a shift and/or breakage of a substrate at relatively reduced cost by decreasing the number of sensors required for the detection. SOLUTION: This invention relates to a method and a device with at least two incorporated sensors 140A and 140B which detect a defect, such as the breakage and the shift of the substrate 106 caused along lengths of at least two parallel ends of the substrate 106 being moved. In an embodiment, a device includes a sensor configuration which senses the substrate nearby at least the two parallel ends for detecting the defect of the substrate. In another embodiment, the device includes a robot 114 or 130 having a substrate support surface and the sensor configuration which senses the substrate nearby at least the two parallel ends for detecting the defect of the substrate. COPYRIGHT: (C)2011,JPO&INPIT