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发明名称
VACUUM PUMP AND VACUUM PROCESSING DEVICE
摘要
申请公布号
JPH06137289(A)
申请公布日期
1994.05.17
申请号
JP19920291106
申请日期
1992.10.29
申请人
NEC KANSAI LTD
发明人
FUKUYAMA HIROSHI
分类号
F04C25/02;(IPC1-7):F04C25/02
主分类号
F04C25/02
代理机构
代理人
主权项
地址
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