CORROSION-RESISTANT MEMBER AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a corrosion-resistant member which is used in halogen-based corrosive gasses such as a fluorine-based corrosive gas and a chlorine-based corrosive gas and in the plasma of these gasses and has the dielectric constant and strength enough to use as an electrostatic chuck. SOLUTION: The corrosion-resistant member has a sintered compact of a compound oxide including aluminum, yttrium and a rare-earth element except for yttrium. The sintered compact has the ratio [NRE/(NY+NRE)] being the ratio of the number of atoms (NRE) of the rare-earth element except for the yttrium to the sum (NY+NRE) of the number of atoms (NY) of the yttrium and the number of atoms (NRE) of the rare earth element except for the yttrium of≥0.05 and <0.5. The average particle size in the sintered compact is 0.5-10μm and the maximum particle size is≤30μm. COPYRIGHT: (C)2011,JPO&INPIT