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发明名称
Method for purifying chlorosilanes
摘要
申请公布号
EP2036858(B1)
申请公布日期
2011.07.13
申请号
EP20080015695
申请日期
2008.09.05
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
UEHARA, KATSUHIRO;KUBOTA, TOHRU;OSIMA, MITSUYOSHI
分类号
C01B33/107
主分类号
C01B33/107
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代理人
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地址
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