| 摘要 |
PURPOSE: A bubble processing apparatus is provided to continuously and completely eliminate bubbles and cost-effectively implement a bubble eliminating process without a bubble eliminating agent. CONSTITUTION: A bubble processing apparatus(E) includes a inhaling part(11) and processing part(12). The inhaling part inhales bubbles(D) which is generated from a surface processing apparatus when a photo-resist(C) is dissolved in an alkaline processing solution(B). The surface processing apparatus sprays the alkaline processing solution toward a substrate in order to implement a surface processing process. The processing part is interposed between the surface processing apparatus and the inhaling part and separates the bubbles into liquid and gas. |
