Method and system for the calculation of the sensitivities of an electrical parameter of an integrated circuit

摘要

A method and system for determining electrical parameter data for a layer of an integrated circuit that can include a nominal electrical parameter value, and sensitivity values which represent the sensitivities of the nominal electrical parameter value to variations in the nominal parameter values. A template of the layer geometry is provided from a portion of which a set of linear equations are developed and which equations are solved using a two step method and from which solution the nominal electrical parameter values are determined. An auxiliary set of the original linear equations is developed from the original set using the adjoint method and from the solution of the auxiliary set using the two step method the sensitivity values are calculated.