| 发明名称 |
RESIN SUITABLE FOR AN ACID GENERATOR AND A CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION CONTAINING THE SAME |
| 摘要 |
The present invention provides a resin which generates an acid by irradiation and is a salt of an organic cation and an anionic polymer wherein the anionic polymer has no carbon-carbon unsaturated bond. The present invention further provides a chemically amplified resist composition comprising the same.
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| 申请公布号 |
US2011165519(A1) |
申请公布日期 |
2011.07.07 |
| 申请号 |
US201113051479 |
申请日期 |
2011.03.18 |
| 申请人 |
ANDO NOBUO;TAKEMOTO ICHIKI;YOSHIDA ISAO;HARADA YUKAKO |
发明人 |
ANDO NOBUO;TAKEMOTO ICHIKI;YOSHIDA ISAO;HARADA YUKAKO |
| 分类号 |
G03F7/004;C08F228/02 |
主分类号 |
G03F7/004 |
| 代理机构 |
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