| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator putting in order the directions of forces acting on an active part to reduce a variation in piezoelectric characteristics. <P>SOLUTION: Two green sheets 48 of almost the same thickness are laminated with a common electrode 43 interposed therebetween (the laminating step). The two green sheets 48 and the common electrode 43 are integrally sintered at a predetermined sintering temperature (the sintering step). Then, warping directions of two piezoelectric sheets 50 are confirmed to determine that the active part R1 is formed on one of the piezoelectric sheets 50 on the depressed side of a laminate of the two piezoelectric sheets 50 (the active part position-determining step). Then, a plurality of individual electrodes 42 are formed on a part of a surface of a piezoelectric layer 41 on which the active part R1 is to be formed and a voltage is applied between the individual electrodes 42 and the common electrode 43 to polarize a part of the piezoelectric layer 41 between these electrodes in a direction parallel to its thickness direction to form the active part R1 (the active part-forming step). <P>COPYRIGHT: (C)2011,JPO&INPIT |
