OPTICAL IMAGE MEASURING DEVICE AND OPTICAL ATTENUATOR

摘要

PROBLEM TO BE SOLVED: To provide an optical image measuring device obtaining suitability of detection of interference light by enabling minute adjustment of a light quantity.

SOLUTION: A cam surface 303a of a cam 303 has a shape corresponding to a light quantity distribution on a cross section of reference light LR. When the cam 303 is rotated by a stepping motor 302, an abutment part 312 is moved following displacement of the cam surface 303a resulting from rotation of the cam 303. A light shielding link 310 is rotated around a rotating shaft 311 together with movement of the abutment part 312. A shielding part 313 changes a shielding domain of the reference light LR by moving in a first direction together with rotation of the light shielding link 310. A light shielding plate 400 can shield the reference light LR from a second direction which is different from a shielding direction (first direction) by an attenuator 300. The light shielding plate 400 is moved by a driving mechanism 410 to change the shielding domain.

COPYRIGHT: (C)2011,JPO&INPIT