| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas cooling module used for achievement of generation of a laser beam not by employing a slab system, but by employing a stable resonator, in a gas laser oscillation device that does not perform gas circulation cooling by using a blower. SOLUTION: The gas laser oscillation device includes a discharge module of exciting a laser gas, a discharge tube 1 having the laser gas disposed therein to generate a discharge, an optical resonator constituted by disposing the discharge tube 1 along an optical axis and sandwiching it between a total reflection mirror 6 and a partial reflection mirror 7 which face each other, and a refrigerant module including a plurality of electromagnets 12 on a circumference of the discharge tube 1 and coming into contact with the discharge tube 1, and can rotate on an axis of rotation aligned with the optical axis. The gas laser oscillation device is provided with a driving module of rotating the electromagnets 12 and a refrigerant, and gas molecules in the discharge tube 1 move by turning ON/OFF sequentially the plurality of electromagnets 12 to be cooled with the refrigerant. COPYRIGHT: (C)2011,JPO&INPIT
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