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发明名称
CLEANING A COMPONENT OF A PROCESS CHAMBER
摘要
申请公布号
KR101045442(B1)
申请公布日期
2011.06.30
申请号
KR20057022218
申请日期
2004.04.14
申请人
发明人
分类号
H01L21/304;B08B3/00;B08B7/00;B08B7/04;B08B9/00;C23C16/44
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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