| 发明名称 |
A METHOD FOR SUPPLY AND DISCHARGE A BASE PLATE |
| 摘要 |
<p>PURPOSE: A method for supplying and discharging flat type targets is provided to improve the workability of post-processes by including a rotatable moving table. CONSTITUTION: A moving table(300) rotates at the same plane as a supplying line and a discharging line. Cassettes(160, 170, 180) receive and discharge target by being adjacent to the moving path of the moving table. An elevating part vertically elevates the moving table or the cassettes. The target is moved from the cassettes to the moving table. Surface treated target is moved from the discharging line to the moving table.</p> |
| 申请公布号 |
KR20110072926(A) |
申请公布日期 |
2011.06.29 |
| 申请号 |
KR20090130042 |
申请日期 |
2009.12.23 |
| 申请人 |
INATECH CO., LTD.;ANI MOTIONTECH CO., LTD. |
发明人 |
SHIN, DONG HYUK;SIN, GYE CHEOL |
| 分类号 |
H01L21/67;H01L21/677 |
主分类号 |
H01L21/67 |
| 代理机构 |
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代理人 |
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