DISK FOR CHEMICAL VAPOR DEPOSITION

摘要

PURPOSE: A disk for a chemical vapor deposition device is provided to reduce the wavelength dispersion of a light emitting diode device by preventing a temperature difference between the edge and the center of the substrate. CONSTITUTION: A mounter(110) includes a trench(110b) and a support unit which supports a substrate. The trench is arranged along the frame of the support unit and corresponds to the edge of a plate. A sidewall unit(120) is arranged along the outside of the mounter. The trench is formed on the upper side of the disk. The support unit has a constant curvature and a recessed shape. The trench is extended to the outer end of the sidewall unit of the disk.