发明名称 Methods of transferring a lamina to a receiver element
摘要 Methods for bonding a donor wafer to a receiver element and transferring a lamina from the donor wafer to the receiver element are disclosed herein. The donor wafer may be, for example, a monocrystalline silicon wafer with a thickness of from about 300 microns to about 1000 microns, and the lamina may be may be less than 100 microns thick. The receiver element may be composed of, for example, metal or glass, and the receiver element may have dissimilar thermal expansion properties from the lamina. Although the lamina and the receiver element may have dissimilar thermal expansion properties, the methods disclosed herein maintain the integrity of the bond between the lamina and the receiver element.
申请公布号 US7967936(B2) 申请公布日期 2011.06.28
申请号 US20080335479 申请日期 2008.12.15
申请人 TWIN CREEKS TECHNOLOGIES, INC. 发明人 AGARWAL ADITYA;SIVARAM SRINIVASAN;VYVODA MICHAEL
分类号 B29C65/16;B29C65/56;B32B37/02;B32B37/06;B32B37/10;B32B37/14;B32B37/15;B32B38/10;H01L21/302;H01L21/304 主分类号 B29C65/16
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